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Parameter | Value | |
Data Channels | ||
Number of ADC-s | 10 Fixed | 1 Switchable |
ADC rates | 500 kHz | 250 kHz |
ADC resolution | 18 bit | 16 bit |
DACs | ||
- 4 composite DACs (24 bit) - 1 isolated 16 bit DAC - 1 non-isolated 16 bit DAC - > than 50 service DACs |
||
Lock-in Amplifiers | ||
Number of Lock-In Amplifiers | 2 Analogue | 3 Digital |
Band | 5 MHz | 10 kHz |
Number of harmonics | 4 | 1 |
Gain stage | 0..50 | 0..100 |
Phase/Mag calculation | Digital | Digital |
Phase noise floor | 0,01° | 0,01° |
Thermal Tune | Yes (up to 2,5 MHz) | No |
Generators | ||
Number of generators | 2 | 1 |
Bandwidth | 5 MHz | 10 kHz |
Frequency step | 0,02 Hz | 0,02 Hz |
Bias Voltage | ||
Range | ±10 V (can be extended) | |
Band | 1,5 MHz | |
Digital resolution | 24 bit | |
High Voltage Amplifiers | ||
HV Range | +/-300 V (0..120V for flexure stages) | |
Noise floor, Open Loop, XYZ (1 kHz BW) | 0,3 ppm | |
Noise floor, Closed Loop, XY/Z (300 Hz BW) | 2/4 ppm | |
DAC bit composite | 24 | |
Low Voltage Mode | Yes | |
Flexure stage support | Yes, optional | |
Number of scan axes support | Up to 12 | |
Feedback Loops | ||
Operation type | Digital | |
FB Outputs | Z1, X1, Y1, Z2, X2, Y2, BV, Freq, Amp | |
Nr. of simultaneous loops | 9 | |
FB Law | PID | |
FB Filtration | Digital: FIR, IIR | |
XYZ Sensor support | Yes | |
Compatibility | ||
HybriD AFM™ | Yes | |
Thermal controller | External & Internal | |
Electrochemistry | Yes | |
Magnetic controller | Yes | |
Motorization | Yes (up to 14 motors with extension board) | |
Spectral devices | Full | |
SAM | Yes | |
Software features | ||
Nr. of scan channels | Up to 8 | |
Nr. of scan points | Up to 8000×8000 | |
Nr. of spectroscopy signals | Up to 3 | |
Nr. of spectroscopy points | Up to 10000 | |
Angle scanning | Yes | |
Non-square scan pixels | Yes | |
Overscan | Yes | |
Two pass modes | Yes | |
Single pass modes | Yes | |
Current lithography* | Yes | |
Automatic laser alignment | Yes (Depends on AFM setup) | |
Multiscan | Yes (Depends on AFM setup) | |
Virtual signals** | Yes | |
SDK | Nova PowerScript & LabView | |
Point, EOL, EOS functions | Triggering and custom scripts | |
User inputs-outputs | ||
Analogue inputs | 4 | |
Digital inputs | 1 | |
Analogue outputs | 3 | |
Digital outputs | 2 | |
General | ||
Computer interface | USB 2.0 | |
Self-test routine | Yes | |
Power supply | 110/220V | |
Upgradeability | Yes |