90×90×0,5 µm
image of collagen fibers
captured @ 1 & 10Hz scanning rates
Active Resonance Damping applied via 4-order digital IIR filtering allow to operate 90 µm scanner at speeds up to 50 Hz without side-ringing
Parameter | Value |
Travel range (XY/Z), μm | 90×90×4 ±10% |
Closed loop sensors (XYZ) | Capacitive |
Sample size, ⌀ mm | 15 |
Vertical noise floor, pm | 30 |
XY position noise (Closed Loop), nm | 0,1 |
Nonlinearity, % | 0,1 |
Resonance Frequency (XY/Z), kHz | 0,8/12 |
Active resonance damping | Automatically tuned 4-th order IIR digital notch-filters |