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AFM Lithography by Local Probe Oxidation

AFM nanolithography image obtained by electrical local probe oxidation technique on ultrathin titanium film. Voltage on the tip and time of anodization: -8V and 1ms.

afm_lithography_by_local_probe_oxidation_510.2x529
afm_lithography_by_local_probe_oxidation_510.2x529
AFM Lithography by Local Probe Oxidation
AFM nanolithography image obtained by electrical local probe oxidation technique on ultrathin titanium film. Voltage on the tip and time of anodization: -8V and 1ms.
size: 510.2x529.1 nm
SPM principle: AFM Oxidation Lithography
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