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AFM "Plowing" Nanolithography

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Vector dynamic lithography in a latex film. The film was formed by hexagonally packed latex spheres with a diameter of 170 nm deposited on a glass slide. The film was then heated to about 120C and cooled down to room temperature. The traces of a former hexagonal stracture are seen on a background in the image (b) which is the image (a) visualized with a more narrow height range.

Sample courtesy of Prof. Joseph Keddie, Department of Physics, University of Surrey, Guildford, Surrey GU2 7XH, England, UK


solver_p47_300
solver_p47_300
AFM Resonant Mode Lithography


size: 3.7x3.7x0.07 um
SPM principle: AFM Lithography - Dynamic Plowing
solver_p47_300a
AFM Resonant Mode Lithography


size: 3.7x3.7x0.07 um
SPM principle: AFM Lithography - Dynamic Plowing
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